The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Jun. 25, 2008
Hidekimi Kadokura, Sakado, JP;
Shintaro Higashi, Tsurugashima, JP;
Yoshinori Kuboshima, Tokyo, JP;
Yumiko Kawano, Nirasaki, JP;
Hidekimi Kadokura, Sakado, JP;
Shintaro Higashi, Tsurugashima, JP;
Yoshinori Kuboshima, Tokyo, JP;
Yumiko Kawano, Nirasaki, JP;
Kabushikikaisha Kojundokagaku Kenkyusho, Saitama, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention provides a process for forming a strontium-containing thin film of a cyclopentadienyl-based strontium compound, which is in the liquid state at room temperature to 50° C., can be purified by distillation, present as a monomer, has high vapor pressure, and suitable for mass production. bis(propyltetramethylcyclopentadienyl)strontium is used as an Sr source to form a strontium-containing thin film such as a SrTiOfilm, a (Ba, Sr)TiOfilm by chemical vapor deposition or atomic layer deposition.