The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Dec. 03, 2009
Cornelis Sander Kooijman, Veldhoven, NL;
Gerardus Nicolaas Anne Van Veen, Waalre, NL;
Albertus Aemillius Seyno Sluijterman, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Gerardus Nicolaas Anne van Veen, Waalre, NL;
Albertus Aemillius Seyno Sluijterman, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer electrode. As a result of the resistive behavior of the surface layer the current induced by a scattered electron, e.g. holes, are divided over the electrodes, so that a current Iand Iis induced, the sum of the current proportional to the energy of the impinging electron and the normalized ratio a function of the radial position where the electron impinges.