The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Jul. 19, 2007
Yung-tai Hung, Hsinchu, TW;
Chin-tsan Yeh, Hsinchu, TW;
Chin-ta Su, Hsinchu, TW;
Ling-wu Yang, Hsinchu, TW;
Tung-han Chuang, Hsinchu, TW;
Yung-Tai Hung, Hsinchu, TW;
Chin-Tsan Yeh, Hsinchu, TW;
Chin-Ta Su, Hsinchu, TW;
Ling-Wu Yang, Hsinchu, TW;
Tung-Han Chuang, Hsinchu, TW;
MACRONIX International Co., Ltd., Hsinchu, TW;
Abstract
A conductor removal process is described, which is applied to a substrate that has thereon a plurality of patterns and a blanket conductor layer covering the patterns. An upper portion of the blanket conductor layer entirely over the patterns is oxidized to form a dielectric layer. A CMP step is performed to remove the dielectric layer and a portion of the remaining conductor layer in turn and thereby expose the patterns.