The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Oct. 13, 2010
John S. Foster, Santa Barbara, CA (US);
Alok Paranjpye, Santa Barbara, CA (US);
Douglas L. Thompson, Santa Barbara, CA (US);
John S. Foster, Santa Barbara, CA (US);
Alok Paranjpye, Santa Barbara, CA (US);
Douglas L. Thompson, Santa Barbara, CA (US);
Innovative Micro Technology, Goleta, CA (US);
Abstract
Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. One of the metal layer may have a diffusion barrier layer and a 'keeper' layer formed thereover, wherein the keeper layers keeps the metal confined to a particular area. By using such a 'keeper' layer, the substrate components may be heated to clean their surfaces, without activating or spending the bonding mechanism.