The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Mar. 23, 2009
Ramidin Izair Kamidi, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Ronald Casper Kunst, Geldrop, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Marcel François Heertjes, Best, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Ronald Casper Kunst, Geldrop, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Marcel François Heertjes, Best, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A stage system includes a movable stage, at least two encoder heads each constructed to provide an encoder signal representative of a position of the movable stage with respect to an encoder target structure, and a controller to control a position of the stage. The controller is provided with the encoder signals of each of the encoder heads. The controller is arranged to apply a weighting function to the encoder signals and to derive a position of the stage from the weighted encoder signals.