The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
May. 11, 2011
Takanori Muramoto, Kasugai, JP;
Takuya Ohno, Kasugai, JP;
Tsukasa Adachi, Kasugai, JP;
Koji Hashizume, Kasugai, JP;
Yosimasa Miyajima, Kasugai, JP;
Takao Kojima, Kasugai, JP;
Takanori Muramoto, Kasugai, JP;
Takuya Ohno, Kasugai, JP;
Tsukasa Adachi, Kasugai, JP;
Koji Hashizume, Kasugai, JP;
Yosimasa Miyajima, Kasugai, JP;
Takao Kojima, Kasugai, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A bonded-substrate fabricating apparatus capable of reducing defective bonded substrates fabricated. A transfer robot sucks the outer edge area of the bottom surface of a substrate and spouts gas toward the bottom surface of the substrate to carry the substrate into a vacuum process chamber of a press machine while keeping the substrate horizontally. A press plate holds the substrate, which is held by the transfer robot, by suction.