The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jun. 13, 2007
Yasushi Yagi, Hyogo, JP;
Shingo Watanabe, Hyogo, JP;
Toshihisa Nozawa, Hyogo, JP;
Chuichi Kawamura, Aichi, JP;
Kimihiko Yoshino, Aichi, JP;
Tadahiro Ohmi, Miyagi, JP;
Yasushi Yagi, Hyogo, JP;
Shingo Watanabe, Hyogo, JP;
Toshihisa Nozawa, Hyogo, JP;
Chuichi Kawamura, Aichi, JP;
Kimihiko Yoshino, Aichi, JP;
Tadahiro Ohmi, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
National University Corporation Tohoku University, Miyagi, JP;
Abstract
Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.