The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Nov. 10, 2009
Naoto Motoike, Kawasaki, JP;
Yasuhiko Kakinoya, Kawasaki, JP;
Naoto Motoike, Kawasaki, JP;
Yasuhiko Kakinoya, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of an acid; an acid generator component (B) which generates an acid upon exposure; and an organic solvent (S), wherein the base component (A) includes a polymeric compound (A1) which contains a structural unit (a0) represented by the general formula (a0-1) shown below: (in the formula, Rrepresents a hydrogen atom, a lower alkyl group, or a halogenated lower alkyl group; Rrepresents a bivalent linking group; and Rrepresents a cyclic group which has —SO— within the ring skeleton), and the organic solvent (S) includes a cyclic ketone having a 5 to 7-membered ring or an ether represented by the general formula (S-1) shown below: (in the formula, Rrepresents an alkyl group of 1 to 5 carbon atoms; Rrepresents an alkyl group of 1 to 3 carbon atoms; and n represents an integer of 0 to 2).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile