The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Apr. 24, 2008
Masato Moriya, Tokyo, JP;
Yoshifumi Ueno, Tokyo, JP;
Tamotsu Abe, Tokyo, JP;
Akira Sumitani, Tokyo, JP;
Masato Moriya, Tokyo, JP;
Yoshifumi Ueno, Tokyo, JP;
Tamotsu Abe, Tokyo, JP;
Akira Sumitani, Tokyo, JP;
Gigaphoton Inc., Tochigi-Ken, JP;
Abstract
A method for cleaning an optical element of an extreme ultraviolet light source device for removing, from the optical element in a chamber, scattered matter generated together with extreme ultraviolet light by plasma formed through laser beam excitation of a target in the chamber, the method which comprises: making the scattered matter generated by the plasma no larger than nanosize by using solid tin as the target and using a COlaser as an excitation source of the solid tin; and imparting, to the scattered matter no larger than the nanosize adhered to the optical element, an effect of overcoming the adherence of the scattered matter.