The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Mar. 02, 2009
Akira Kataoka, Kanagawa, JP;
Ikunao Isomura, Kanagawa, JP;
Ryoichi Hirano, Tokyo, JP;
Nobutaka Kikuiri, Tokyo, JP;
Susumu Iida, Kanagawa, JP;
Akira Kataoka, Kanagawa, JP;
Ikunao Isomura, Kanagawa, JP;
Ryoichi Hirano, Tokyo, JP;
Nobutaka Kikuiri, Tokyo, JP;
Susumu Iida, Kanagawa, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A workpiece inspection apparatus includes a measured image generator unit configured to measure a pattern of a workpiece and generate a measured image; and a comparator unit configured to compare the measured image to a fiducial image, wherein said measured image generator unit includes a light-receiving device having an interconnection of two or more time delay integration (TDI) sensors each being arranged by two or more line sensors each being arranged by two or more pixels, for generating as the measured image an average value of pixel values excluding an abnormal pixel value from pixels of each TDI sensor with respect to a position of the pattern of the workpiece.