The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Dec. 30, 2009
Minoru Yoshida, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kaoru Sakai, Yokohama, JP;
Takafumi Okabe, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kaoru Sakai, Yokohama, JP;
Takafumi Okabe, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A pattern inspection method and apparatus in which a deep ultraviolet light or an ultraviolet light is irradiated onto a specimen on which a pattern is formed, an image of the specimen which is irradiated with the deep ultraviolet light or the ultraviolet light is formed and the formed image is detected with a rear-surface irradiation type image sensor, which is sensitive to wavelengths of no greater than 400 nmm. A signal outputted from the image sensor is processed so as to detect a defect of the specimen by converting an analog image signal outputted from the image sensor to a digital image signal with an A/D converter, and a display displays information of the defect detected.