The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Oct. 05, 2009
Lakshmanan Karuppiah, San Jose, CA (US);
Dan Zhang, Fremont, CA (US);
Simon Yavelberg, Cupertino, CA (US);
Jim K. Atkinson, Los Gatos, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Noel Manto, Walnut Creek, CA (US);
Jonathan Domin, Sunnyvale, CA (US);
Lakshmanan Karuppiah, San Jose, CA (US);
Dan Zhang, Fremont, CA (US);
Simon Yavelberg, Cupertino, CA (US);
Jim K. Atkinson, Los Gatos, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Noel Manto, Walnut Creek, CA (US);
Jonathan Domin, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.