The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Feb. 06, 2009
Marinus Aart Van Den Brink, Moergestel, NL;
Hans Butler, Best, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Georgo Angelis, Heesch, NL;
Renatus Gerardus Klaver, Eindhoven, NL;
Martijn Robert Hamers, 's-Hertogenbosch, NL;
Boudewijn Theodorus Verhaar, Eindhoven, NL;
Peter Hoekstra, Veldhoven, NL;
Marinus Aart Van Den Brink, Moergestel, NL;
Hans Butler, Best, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Georgo Angelis, Heesch, NL;
Renatus Gerardus Klaver, Eindhoven, NL;
Martijn Robert Hamers, 's-Hertogenbosch, NL;
Boudewijn Theodorus Verhaar, Eindhoven, NL;
Peter Hoekstra, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In an embodiment, a stage system calibration method includes moving the stage relative to an encoder grid in response to a setpoint signal and measuring a position of the stage by a sensor head cooperating with the encoder grid. The position of the stage is controlled by a stage controller. A signal representative of a difference between the setpoint signal and the position of the stage as measured by the sensor head is registered. The stage system is calibrated from the registered signal representative of the difference.