The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Nov. 21, 2008
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Johan Hendrik Geerke, Eindhoven, NL;
Joost DE Pee, Veldhoven, NL;
Clementius Andreas Johannes Beijers, Eindhoven, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Francois Xavier Debiesme, Weert, NL;
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Johan Hendrik Geerke, Eindhoven, NL;
Joost De Pee, Veldhoven, NL;
Clementius Andreas Johannes Beijers, Eindhoven, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Francois Xavier Debiesme, Weert, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus may be provided with an acoustic resonator to dampen an acoustic vibration in the lithographic apparatus. The acoustic resonator may include a Helmholtz resonator. The helmholz resonator may be provided with an active element to provide active damping and/or altering a spring characteristic of the mass spring assembly formed by the resonator. The resonator may be provided at a slit in a shield between the patterning device stage and the projection system to suppress transfer of acoustical vibrations, caused by e.g. a movement of the patterning device stage, to the projection system.