The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Aug. 09, 2011
Steven C. Shannon, San Mateo, CA (US);
Jang Gyoo Yang, San Jose, CA (US);
Matthew L. Miller, Fremont, CA (US);
Kartik Ramaswamy, San Jose, CA (US);
James P. Cruse, Santa Cruz, CA (US);
Steven C. Shannon, San Mateo, CA (US);
Jang Gyoo Yang, San Jose, CA (US);
Matthew L. Miller, Fremont, CA (US);
Kartik Ramaswamy, San Jose, CA (US);
James P. Cruse, Santa Cruz, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.