The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2012

Filed:

Apr. 29, 2011
Applicants:

Faysal Boughorbel, Eindhoven, NL;

Cornelis Sander Kooijman, Veldhoven, NL;

Berend Helmerus Lich, Weert, NL;

Eric Gerardus Theodoor Bosch, Eindhoven, NL;

Inventors:

Faysal Boughorbel, Eindhoven, NL;

Cornelis Sander Kooijman, Veldhoven, NL;

Berend Helmerus Lich, Weert, NL;

Eric Gerardus Theodoor Bosch, Eindhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01); G21K 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps:


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