The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Jun. 21, 2010
Applicants:
Toru Shirasaki, Gunma, JP;
Kishore Chakravorty, Santa Clara, CA (US);
David Mushell, Santa Clara, CA (US);
Grace NG, Santa Clara, CA (US);
Inventors:
Toru Shirasaki, Gunma, JP;
Kishore Chakravorty, Santa Clara, CA (US);
David Mushell, Santa Clara, CA (US);
Grace Ng, Santa Clara, CA (US);
Assignees:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
Abstract
A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has a curved line-containing recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and an area of no greater than 20 mm.