The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
May. 23, 2007
Hiroyuki Ebi, Kyoto, JP;
Tetsuo Shimizu, Kyoto, JP;
Hitoshi Kitagawa, Kyoto, JP;
Shuji Moriya, Tokyo, JP;
Tsuneyuki Okabe, Tokyo, JP;
Hiroyuki Ebi, Kyoto, JP;
Tetsuo Shimizu, Kyoto, JP;
Hitoshi Kitagawa, Kyoto, JP;
Shuji Moriya, Tokyo, JP;
Tsuneyuki Okabe, Tokyo, JP;
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
A thermal mass flow meter and a thermal mass flow control device addresses a thermal siphon error, even if they are in a compact and inexpensive structure, without using a flow path converting block. A control computing process portion is configured to correct a measurement error caused by thermal siphon by calculating a correction value based on a measurement value at time of depressurizing fluid flow path and flow rate measuring conduit to an atmospheric pressure or less, a difference between the measurement value and a measurement value at time of charging an actual fluid into the flow rate measuring conduit, kind of the actual fluid, pressure at time of charging the actual fluid, and flow ratio of the fluid flowing in the fluid flow path and the flow rate measuring conduit, storing the correction value, and correcting an actual measured output flow value by the stored correction value.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile