The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Dec. 02, 2008
Koen Steffens, Veldhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Ronald Van Der Ham, Maarheeze, NL;
Daniël Jozef Maria Direcks, Simpelveld, NL;
Gert-jan Gerardus Johannes Thomas Brands, Waalre, NL;
Koen Steffens, Veldhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Ronald Van Der Ham, Maarheeze, NL;
Daniël Jozef Maria Direcks, Simpelveld, NL;
Gert-Jan Gerardus Johannes Thomas Brands, Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A liquid handling system is disclosed in which an extractor to contain liquid in a space between the projection system of a lithographic apparatus and a substrate has, in plan, a shape with a single corner. The extractor is provided in a rotatable part of a liquid handling system. The rotatable part is rotated under the control of a controller.