The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Feb. 22, 2011
Chien-huei (Adam) Chen, San Jose, CA (US);
Xiaoming Wang, San Jose, CA (US);
Eugene Shifrin, Sunnyvale, CA (US);
Tsung-pao Fang, Milpitas, CA (US);
Chien-Huei (Adam) Chen, San Jose, CA (US);
Xiaoming Wang, San Jose, CA (US);
Eugene Shifrin, Sunnyvale, CA (US);
Tsung-Pao Fang, Milpitas, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Methods for identifying an edge of a care area for an array area formed on a wafer and/or for binning defects detected in the array area are provided. One method for identifying an edge of a care area for an array area formed on a wafer includes determining a value for a difference image as a function of position from a position known to be inside the array area to a position known to be outside of the array area. The method also includes identifying the position that is located closest to the inside of the array area and that has the value greater than a threshold as a position of the edge of the care area.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile