The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Feb. 23, 2009
Hiroshi Yamada, Nirasaki, JP;
Hirofumi Katagiri, Nirasaki, JP;
Tetsuji Watanabe, Nirasaki, JP;
Takeshi Kawaji, Nirasaki, JP;
Hiroshi Yamada, Nirasaki, JP;
Hirofumi Katagiri, Nirasaki, JP;
Tetsuji Watanabe, Nirasaki, JP;
Takeshi Kawaji, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A needle trace transfer member to which needle traces of probes are transferred is installed at a movable mounting table to align the probes before electrical characteristics of a target object on the mounting table are inspected by bringing the probes into electrical contact with the target object. The needle trace transfer member is made of a shape memory polymer transformed reversibly and rapidly between a glass state with a high modulus elasticity and a rubber state with a low modulus of elasticity near its glass transition temperature. The glass transition temperature is set to a temperature close to a set temperature of the mounting table. The shape memory polymer is mainly made of polyurethane-based resin.