The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2012

Filed:

Jun. 30, 2010
Applicants:

Hiroaki Mizushima, Kanagawa, JP;

Fumihiko Hayashi, Kanagawa, JP;

Inventors:

Hiroaki Mizushima, Kanagawa, JP;

Fumihiko Hayashi, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01);
U.S. Cl.
CPC ...
Abstract

A nonvolatile semiconductor memory device includes a first columnar protrusion and a second columnar protrusion formed to be spaced out on a surface of a semiconductor substrate, and the first and the second columnar protrusions each include a split gate nonvolatile memory cell in which a first source/drain region and a second source/drain region are formed at a surrounding part and an extremity, and in which a first layered structure, in which a charge accumulating film and a memory gate line are layered, and a second layered structure, in which a gate oxide film and a control gate line are layered, are formed on a surface of a sidewall between the surrounding part and the extremity. The first layered structure is also formed between the first and second columnar protrusions, whereby the memory gate line of the first columnar protrusion and the second columnar protrusion is connected each other.


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