The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Sep. 09, 2009
Juwen Gao, Fremont, CA (US);
Wei Lei, Santa Clara, CA (US);
Michal Danek, Cupertino, CA (US);
Erich Klawuhn, Los Altos, CA (US);
Sean Chang, Cupertino, CA (US);
Ron Powell, Portola Valley, CA (US);
Juwen Gao, Fremont, CA (US);
Wei Lei, Santa Clara, CA (US);
Michal Danek, Cupertino, CA (US);
Erich Klawuhn, Los Altos, CA (US);
Sean Chang, Cupertino, CA (US);
Ron Powell, Portola Valley, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
Methods of improving the adhesion of low resistivity tungsten/tungsten nitride layers are provided. Low resistivity tungsten/tungsten nitride layers with good adhesion are formed by treating a tungsten or tungsten nitride layer before depositing low resistivity tungsten. Treatments include a plasma treatment and a temperature treatment. According to various embodiments, the treatment methods involve different gaseous atmospheres and plasma conditions.