The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Oct. 05, 2009
Takehiro Seshimo, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Fumitake Kaneko, Kawasaki, JP;
Kotaro Endo, Kawasaki, JP;
Takehiro Seshimo, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Fumitake Kaneko, Kawasaki, JP;
Kotaro Endo, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A positive resist composition including: a base component (A) which includes a polymeric compound (A1) containing a structural unit (a0) represented by the general formula (a0-1) and a structural unit (a1) derived from an acrylate ester having an acid dissociable, dissolution inhibiting group; and an acid generator component (B) which includes an acid generator (B1) containing an anion moiety represented by the general formula (I): (in the formula (a0-1), Rrepresents a hydrogen atom, a lower alkyl group of 1 to 5 carbon atoms or a halogenated lower alkyl group of 1 to 5 carbon atoms; Rrepresents a bivalent linking group; and Rrepresents a cyclic group containing —SO— within the ring skeleton. In the formula (I), X represents a cyclic group of 3 to 30 carbon atoms, Qrepresents a bivalent linking group containing an oxygen atom; Yrepresents an alkylene group of 1 to 4 carbon atoms or a fluorinated alkylene group of 1 to 4 carbon atoms).