The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Jul. 08, 2009
Akiya Kawaue, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Takehiro Seshimo, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Naoto Motoike, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Takehiro Seshimo, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Naoto Motoike, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid; and an acid-generator component (B) which generates acid upon exposure, wherein said acid-generator component (B) comprises an acid generator (B1) including a compound represented by general formula (b1-11) shown below: