The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Dec. 01, 2010
Takahiro Eto, Kawasaki, JP;
Takuya Ohhashi, Kawasaki, JP;
Masaru Takahama, Kawasaki, JP;
Daijiro Mori, Kawasaki, JP;
Akira Kumazawa, Kawasaki, JP;
Takahiro Eto, Kawasaki, JP;
Takuya Ohhashi, Kawasaki, JP;
Masaru Takahama, Kawasaki, JP;
Daijiro Mori, Kawasaki, JP;
Akira Kumazawa, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
Provided are a cleaning liquid for lithography that exhibits excellent corrosion suppression performance in relation to tungsten, and excellent removal performance in relation to a resist film or the like, and a method for forming a wiring using the cleaning liquid for lithography. The cleaning liquid for lithography according to the present invention includes a quaternary ammonium hydroxide, a water-soluble organic solvent, water, an inorganic salt and an anti-corrosion agent represented by a general formula (1) below. In the general formula (1), Rrepresents an alkyl group or an aryl group having 1-17 carbon atoms, and Rrepresents an alkyl group having 1-13 carbon atoms.