The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Mar. 28, 2007
Hiroyuki Tachibana, Okayama, JP;
Kazutoshi Murata, Okayama, JP;
Nozomu Hattori, Okayama, JP;
Mitsui Engineering & Shipbuilding Co., Ltd., Tokyo, JP;
Abstract
An atomic layer growing apparatus includes a film forming chamber () in which the vapor phase growth of a film is performed, a substrate table () having a heating mechanism accommodated in the film forming chamber (), and an exhaust mechanism (). The atomic layer growing apparatus also includes a material supply unit () including a material vaporizer (), two buffer tanks, i.e., a buffer tank A () and buffer tank B (), a fill valve A () and supply valve A () of the buffer tank A (), a fill valve B () and supply valve B () of the buffer tank B (), an injection control valve (), and a control unit () which controls the opening/closing of each valve.