The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8191397 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 05, 2012

Filed:

Dec. 11, 2008
Applicants:

Francois Doniat, Wilmington, DE (US);

Ronald S. Inman, Brookfield, IL (US);

Nathan Stafford, Wilmington, DE (US);

Axel Soulet, Berkeley, CA (US);

Jean-louis Marc, La Redorte, FR;

Inventors:

Francois Doniat, Wilmington, DE (US);

Ronald S. Inman, Brookfield, IL (US);

Nathan Stafford, Wilmington, DE (US);

Axel Soulet, Berkeley, CA (US);

Jean-Louis Marc, La Redorte, FR;

Assignees:

Air Liquide Electronics U.S. LP, Dallas, TX (US);

American Air Liquide, Inc., Fremont, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides methods for checking and calibrating one or more concentration sensors in an open or closed system. More specifically, in one embodiment of the present invention, the disclosed method allows for the checking and calibration of one or more concentration sensors in which removal of the liquid from the system is required. In two additional embodiments, the disclosed methods allow for the checking and calibration of one or more concentration sensors without having to remove the liquid from the closed system thereby minimizing contamination of the system while at the same time greatly reducing or eliminating contact of the user with the liquid.


Find Patent Forward Citations

Doniat, Francois. (2012). Methods for checking and calibrating concentration sensors in a semiconductor processing chamber (U.S. Patent No. 8191397). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8191397

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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