The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2012
Filed:
Apr. 05, 2010
Victor Benveniste, Lyle, WA (US);
Bon-woong Koo, Andover, MA (US);
Shardul Patel, North Reading, MA (US);
Frank Sinclair, Quincy, MA (US);
Victor Benveniste, Lyle, WA (US);
Bon-Woong Koo, Andover, MA (US);
Shardul Patel, North Reading, MA (US);
Frank Sinclair, Quincy, MA (US);
Varion Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An ion source is provided that utilizes a cooling plate and a gap interface to control the temperature of an ion source chamber. The gap interface is defined between the cooling plate and a wall of the chamber. A coolant gas is supplied to the interface at a given pressure where the pressure determines thermal conductivity from the cooling plate to the chamber to control the temperature of the interior of the chamber.