The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2012
Filed:
Jun. 18, 2009
Eiji Kato, Miyagi, JP;
Shigeki Nishina, Miyagi, JP;
Motoki Imamura, Miyagi, JP;
Akiyoshi Irisawa, Miyagi, JP;
Tomoyu Yamashita, Miyagi, JP;
Eiji Kato, Miyagi, JP;
Shigeki Nishina, Miyagi, JP;
Motoki Imamura, Miyagi, JP;
Akiyoshi Irisawa, Miyagi, JP;
Tomoyu Yamashita, Miyagi, JP;
Advantest Corporation, Tokyo, JP;
Abstract
According to the present invention, the CT is carried out based on parameters other than the absorption rate. An electromagnetic wave measurement device includes an electromagnetic wave output devicewhich outputs an electromagnetic wave at a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test, an electromagnetic wave detectorwhich detects the electromagnetic wave which has transmitted through the device under test, a relative position changing unitwhich changes a relative position of an intersectionat which an optical path of the electromagnetic wave transmitting through the device under testand the device under testintersect with respect to the device under test, a phase deriving unitwhich derives, based on a detected result by the electromagnetic wave detector, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test, a sinogram deriving unitwhich derives a sinogram based on a derived result by the phase deriving unit, and a cross sectional image deriving unitthat derives, based on the sinogram, an image of a cross section of the device under testincluding a trajectory of the intersection