The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Mar. 22, 2010
Tohru Ando, Tokyo, JP;
Tsutomu Saito, Hitachinaka, JP;
Yasuhiko Nara, Hitachinaka, JP;
Mikio Takagi, Matsudo, JP;
Koichi Takauchi, Chiba, JP;
Tohru Ando, Tokyo, JP;
Tsutomu Saito, Hitachinaka, JP;
Yasuhiko Nara, Hitachinaka, JP;
Mikio Takagi, Matsudo, JP;
Koichi Takauchi, Chiba, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicating circuit design. Specifically, by attaching marks such as rectangles, characters, or lines, to an electron microscope image with software, quick navigation is performed with required minimum information. By using created CAD data, re-navigation with the same equipment and CAD navigation to heterogeneous equipment are performed.