The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Jan. 28, 2010
Takaaki Noda, Toyama, JP;
Jie Wang, Toyama, JP;
Kazuaki Tonari, Tokyo, JP;
Satoru Sugiyama, Tokyo, JP;
Takaaki Noda, Toyama, JP;
Jie Wang, Toyama, JP;
Kazuaki Tonari, Tokyo, JP;
Satoru Sugiyama, Tokyo, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Elpida Memory, Inc., Tokyo, JP;
Abstract
A manufacturing method of a semiconductor device is provided, comprising: loading a substrate into a processing chamber; forming a first film on the substrate by supplying silicon atom-containing gas, boron atom-containing gas, and germanium atom-containing gas into the processing chamber; forming a second film on the first film by supplying the silicon atom-containing gas and the boron atom-containing gas into the processing chamber; and unloading the substrate from the processing chamber.