The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Feb. 16, 2009
Gordon Abbott, Pleasanton, CA (US);
Christophe Fouquet, Sunnyvale, CA (US);
Ori Tadmor, Los Altos, CA (US);
Takuji Tada, Sunnyvale, CA (US);
Gordon Abbott, Pleasanton, CA (US);
Christophe Fouquet, Sunnyvale, CA (US);
Ori Tadmor, Los Altos, CA (US);
Takuji Tada, Sunnyvale, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
Defects observed by imaging tools may be classified by automatic comparison of features observed in a defect image with design information relating to corresponding portions of the image. Defect information may be generated from a defect image from a defect imaging tool. Design information relating to one or more structures to be formed on the substrate in a vicinity of the defect may be retrieved. The defect may be classified based on a combination of the defect information from the defect image and design information relating to one or more structures to be formed on the substrate in the vicinity of the defect.