The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Dec. 15, 2009
Robert A. Bergstedt, Carlsbad, CA (US);
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Nam-hyong Kim, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Nam-Hyong Kim, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; an extreme ultraviolet light vacuum chamber defining an interior vacuum space that houses an extreme ultraviolet light collector and the target location; and a beam delivery system that is configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location. The beam delivery system includes a beam expansion system that expands a size of the amplified light beam and a focusing element that is configured and arranged to focus the amplified light beam at the target location.