The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Dec. 31, 2008
Paul Lefevre, Topsfield, MA (US);
Oscar K. Hsu, Chelmsford, MA (US);
Marc C. Jin, Boston, MA (US);
John Erik Aldeborgh, Boxford, MA (US);
David Adam Wells, Hudson, NH (US);
Paul Lefevre, Topsfield, MA (US);
Oscar K. Hsu, Chelmsford, MA (US);
Marc C. Jin, Boston, MA (US);
John Erik Aldeborgh, Boxford, MA (US);
David Adam Wells, Hudson, NH (US);
Innopad, Inc., Wilmington, MA (US);
Abstract
The present disclosure relates to a polishing pad including a chemical agent present in an amount sufficient to be released and dissolving into an aqueous abrasive particle polishing medium during chemical mechanical planarization and reducing abrasive particle agglomeration and a binder. The pad includes a surface such that as the pad is abraded the surface is renewed exposing at least a portion of the chemical agent.