The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Dec. 04, 2008
Huibert Visser, Zevenhuizen, NL;
Jacob Fredrik Friso Klinkhamer, Delft, NL;
Lev Ryzhikov, Norwalk, CT (US);
Scott D. Coston, New Milford, CT (US);
Adel Joobeur, Milford, CT (US);
Rob Vink, Delft, NL;
Yevgeniy Shmarev, Lagrangeville, NY (US);
Huibert Visser, Zevenhuizen, NL;
Jacob Fredrik Friso Klinkhamer, Delft, NL;
Lev Ryzhikov, Norwalk, CT (US);
Scott D. Coston, New Milford, CT (US);
Adel Joobeur, Milford, CT (US);
Rob Vink, Delft, NL;
Yevgeniy Shmarev, Lagrangeville, NY (US);
ASML Holding N.V., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.