The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Oct. 10, 2008
Hans Butler, Best, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Joost DE Pee, Veldhoven, NL;
Cornelius Adrianus Lambertus DE Hoon, Best, NL;
Stijn Boschker, Pijnacker, NL;
Hans Butler, Best, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Joost De Pee, Veldhoven, NL;
Cornelius Adrianus Lambertus De Hoon, Best, NL;
Stijn Boschker, Pijnacker, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a projection system to project a patterned radiation beam onto a substrate, and a damping system to dampen a vibration of at least part of the projection system, the damping system including an interface damping mass and an active damping subsystem to dampen a vibration of at least part of the interface damping mass, the interface damping mass connected to the projection system, and the active damping subsystem connected to the interface damping mass, the active damping subsystem including a sensor to measure a position quantity of the interface damping mass and an actuator to exert a force on the interface damping mass based on a signal provided by the sensor. The damping system further includes an interface damping device connected to the interface damping mass and configured to damp a movement of the interface damping mass at an eigenfrequency of the interface damping mass.