The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8163651 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 24, 2012

Filed:

Sep. 12, 2008
Applicants:

Miin-jang Chen, Taipei, TW;

Wen-ching Hsu, Hsinchu, TW;

Suz-hua Ho, Jhudong Township, Hsinchu County, TW;

Inventors:

Miin-Jang Chen, Taipei, TW;

Wen-Ching Hsu, Hsinchu, TW;

Suz-Hua Ho, Jhudong Township, Hsinchu County, TW;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention discloses a method of fabricating a first substrate and a method of recycling a second substrate during fabrication of the first substrate. The second substrate is heterogeneous for the first substrate. First, the fabricating method according to the invention is to prepare the second substrate. Subsequently, the fabricating method is to deposit a buffer layer on the second substrate. Then, the fabricating method is to deposit a semiconductor material layer on the buffer layer. The buffer layer assists the epitaxial growth of the semiconductor material layer, and serves as a lift-off layer. Finally, with an etching solution, the fabricating method is to only etch the lift-off layer to debond the second substrate away from the semiconductor material layer, where the semiconductor material layer serves as the first substrate.


Find Patent Forward Citations

Chen, Miin-Jang. (2012). Method of fabricating semiconductor substrate by use of heterogeneous substrate and recycling heterogeneous substrate during fabrication thereof (U.S. Patent No. 8163651). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8163651

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