The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8161421 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 17, 2012

Filed:

Jul. 07, 2008
Applicants:

Ramya Viswanathan, Wappingers Falls, NY (US);

Amr Y. Abdo, Wappingers Falls, NY (US);

Henning Haffner, Pawling, NY (US);

Oseo Park, Hopewell Junction, NY (US);

Michael E. Scaman, Goshen, NY (US);

Inventors:

Ramya Viswanathan, Wappingers Falls, NY (US);

Amr Y. Abdo, Wappingers Falls, NY (US);

Henning Haffner, Pawling, NY (US);

Oseo Park, Hopewell Junction, NY (US);

Michael E. Scaman, Goshen, NY (US);

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of training an Optical Proximity Correction (OPC) model comprises symmetrizing a complex design to be a test pattern having orthogonal symmetry. Symmetrizing may comprise establishing a axis of symmetry passing through the design, thereby dividing the design into two portions; deleting one of the two portions; and mirror-imaging the other of the two portions about the axis of symmetry. The design may be centered.


Find Patent Forward Citations

Viswanathan, Ramya. (2012). Calibration and verification structures for use in optical proximity correction (U.S. Patent No. 8161421). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8161421

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…