The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Jan. 22, 2010
Applicants:
Juergen Frosien, Riemerling, DE;
Dieter Winkler, Munich, DE;
Inventors:
Juergen Frosien, Riemerling, DE;
Dieter Winkler, Munich, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/28 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
Abstract
An ion beam apparatus and a method for providing an energy-filtered primary ion beam are described. Therein, a primary ion beam having an asymmetric first energy distribution is generated by means of an ion source. The primary ion beam is energy filtered using, for example, a retarding lens.