The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Jul. 23, 2009
Applicants:
Martin Trentzsch, Dresden, DE;
Stephan Kronholz, Dresden, DE;
Rolf Stephan, Dresden, DE;
Inventors:
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 35/00 (2006.01); G01R 31/26 (2006.01); H01L 21/66 (2006.01); G01N 29/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
By providing a tool internal sensor device in a process tool in a semiconductor facility, metal contamination may be monitored in situ, thereby avoiding or at least significantly reducing the requirement for sophisticated sample preparation techniques, such as vapor phase decomposition tests in combination with subsequent analysis procedures. Thus, a full time inspection of process tools may be accomplished.