The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 17, 2012

Filed:

Apr. 26, 2007
Applicants:

Boris Druz, Brooklyn, NY (US);

Ivan I. Aksenov, Kharkov, UA;

Olexandr A. Luchaninov, Kharkov, UA;

Volodymyr E. Strelnytskiy, Kharkov, UA;

Volodymyr V. Vasylyev, Kharkov, UA;

Isaak Zaritskiy, Copiague, NY (US);

Piero Sferlazzo, Marblehead, MA (US);

Inventors:

Boris Druz, Brooklyn, NY (US);

Ivan I. Aksenov, Kharkov, UA;

Olexandr A. Luchaninov, Kharkov, UA;

Volodymyr E. Strelnytskiy, Kharkov, UA;

Volodymyr V. Vasylyev, Kharkov, UA;

Isaak Zaritskiy, Copiague, NY (US);

Piero Sferlazzo, Marblehead, MA (US);

Assignee:

Veeco Instruments, Inc., Woodbury, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 16/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

Apparatus for cathodic vacuum-arc coating deposition. The apparatus includes a mixing chamber, at least one input duct projecting from a first end wall of the mixing chamber, and an output duct projecting from a second end wall of the mixing chamber. Coupled with each input duct is a plasma source adapted to discharge an ion flow of a coating material into the mixing chamber, which is subsequently directed to the output duct. A first solenoidal coil disposed about a side wall of the mixing chamber creates a first magnetic field inside the mixing chamber for steering the ion flow. A second solenoidal coil is disposed adjacent to the first end wall and aligned substantially coaxially with the output duct. The second solenoidal coil creates a second magnetic field inside the mixing chamber for steering the first ion flow. The electrical currents flow through the first and second solenoidal coils in opposite solenoidal directions.


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