The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Dec. 19, 2008
Steven Grumbine, Aurora, IL (US);
Chul Woo Nam, Naperville, IL (US);
William Ward, Glen Ellyn, IL (US);
Ramasubramanyam Nagarajan, Naperville, IL (US);
Steven Grumbine, Aurora, IL (US);
Chul Woo Nam, Naperville, IL (US);
William Ward, Glen Ellyn, IL (US);
Ramasubramanyam Nagarajan, Naperville, IL (US);
Cabot Microelectronics Corporation, Aurora, IL (US);
Abstract
A wiresaw cutting fluid composition of the present invention comprises about 25 to about 75% by weight of a particulate abrasive suspended in an aqueous carrier containing a polymeric viscosity modifier that comprises a polymer including a majority of non-ionic monomer units (preferably 100 mol % non-ionic monomer units), has a number average molecular weight (M) of at least about 5 kDa, and is present in the composition at a concentration sufficient to provide a Brookfield viscosity for the composition in the range of about 50 to about 1000 cP, e.g., 50 to about 700 cP, at about 25° C. at a spindle rotation rate of about 60 rpm. In one embodiment, the viscosity modifier comprises a polymer having a weight average molecular weight (M) of at least about 200 kDa. When a viscosity modifier of 200 kDa or greater Mis utilized, a preferred wiresaw cutting method the cutting fluid is circulated and applied by pumps and nozzles operating at a relatively low shear rate of not more than about 10s.