The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Aug. 25, 2008
Jason Z. Lin, Saratoga, CA (US);
Xing Chu, Fremont, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Xing Chu, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A method of inspecting an array having memory blocks and page breaks. The array is imaged, and the image is divided into sections. Sections that include the memory blocks are selected into a candidate image. Pixels within a boundary horizontal line of pixels are inspected to determine horizontal edges of the memory blocks. Pixels within a boundary vertical line of pixels are inspected to determine vertical edges of the memory blocks. An image of a first memory block is compared to an image of a second memory block to determine differences. The differences are flagged as potential memory block defects. Images of the page breaks are compared to determine differences, and the differences are flagged as potential page break defects.