The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Jul. 30, 2008
Toshiyuki Matsumoto, Hyogo, JP;
Tomohide Minami, Hyogo, JP;
Yuichi Douki, Kumamoto, JP;
Koji Mahara, Kumamoto, JP;
Toshiyuki Matsumoto, Hyogo, JP;
Tomohide Minami, Hyogo, JP;
Yuichi Douki, Kumamoto, JP;
Koji Mahara, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A position alignment of a transfer point of a transfer arm is performed by using a position detecting wafer capable of being loaded into an apparatus having a thin transfer port. The position detecting wafer S includes an electrostatic capacitance detecting sensorfor detecting an electrostatic capacitance in relation with a reference object for the position alignment. The electrostatic capacitance detecting sensorincludes a plurality of electrostatic capacitance detecting electrodes, each forming the electrostatic capacitance in relation with the reference object; and a control circuitfor controlling a detection of the electrostatic capacitance by each electrostatic capacitance detecting electrode, while communicating with each electrostatic capacitance detecting electrode. The electrostatic capacitance detecting electrodesare provided on a rear surface of the position detecting wafer S, and the control circuitis provided on a front surface of the position detecting wafer S.