The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Feb. 09, 2009
Applicants:
Bob Kong, Newark, CA (US);
Zhi-wen Sun, San Jose, CA (US);
Chi-i Lang, Sunnyvale, CA (US);
Jinhong Tong, San Jose, CA (US);
Tony Chiang, Campbell, CA (US);
Inventors:
Bob Kong, Newark, CA (US);
Zhi-Wen Sun, San Jose, CA (US);
Chi-I Lang, Sunnyvale, CA (US);
Jinhong Tong, San Jose, CA (US);
Tony Chiang, Campbell, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
Embodiments of the current invention describe methods of processing a semiconductor substrate that include applying a zincating solution to the semiconductor substrate to form a zinc passivation layer on the titanium-containing layer, the zincating solution comprising a zinc salt, FeCl, and a pH adjuster.