The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Dec. 05, 2008
Naoki Ikeuchi, Amagasaki, JP;
Hisashi Fujiwara, Amagasaki, JP;
Masami Yakabe, Minato-ku, JP;
Masato Hayashi, Amagasaki, JP;
Naoki Ikeuchi, Amagasaki, JP;
Hisashi Fujiwara, Amagasaki, JP;
Masami Yakabe, Minato-ku, JP;
Masato Hayashi, Amagasaki, JP;
Tokyo Electron Limited, Minato-ku, JP;
Abstract
A displacement measurement apparatus for a microstructure according to the present invention measures a displacement of the microstructure having a fixed portion electrode including a first electrode and a second electrode and a movable portion electrode located oppositely to the fixed portion electrode. A bias generating circuit applies a bias signal to between the first electrode and the movable portion electrode so that influence of a noise signal on a detection signal picked up from between the second electrode and the movable portion electrode may be reduced. A C/V converting circuit converts a capacitance change that is picked up from between the second electrode and the movable portion electrode into a voltage. A detecting circuit detects a displacement of the movable portion electrode based on the voltage.