The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Sep. 17, 2007
Stephane Morel, Frenouville, FR;
Arnoldus Den Dekker, Beuningen, NL;
Elisabeth C. Rodenburg, Eindhoven, NL;
Eric C. E. Van Grunsven, Someren, NL;
Stephane Morel, Frenouville, FR;
Arnoldus Den Dekker, Beuningen, NL;
Elisabeth C. Rodenburg, Eindhoven, NL;
Eric C. E. Van Grunsven, Someren, NL;
NXP B.V., Eindhoven, NL;
Abstract
An integrated circuit is provided that comprises a substrate of silicon and an interconnect in a through-hole extending from the first to the second side of the substrate. The interconnect is coupled to a metallization layer on the first side of the substrate and is provided on an amorphous silicon layer that is present at a side wall of the through-hole, and particularly at an edge thereof adjacent to the first side of the substrate. The interconnect comprises a metal stack of nickel and silver. A preferred way of forming the amorphous silicon layer is a sputter etching technique.