The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Mar. 14, 2008
Christian Wolters, Cambell, CA (US);
Anatoly Romanovsky, Palo Alto, CA (US);
Daniel Kavaldjiev, Milpitas, CA (US);
Bret Whiteside, Gilroy, CA (US);
Christian Wolters, Cambell, CA (US);
Anatoly Romanovsky, Palo Alto, CA (US);
Daniel Kavaldjiev, Milpitas, CA (US);
Bret Whiteside, Gilroy, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.