The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Apr. 26, 2006
Ivan Petrov Ganachev, Kanagawa-ken, JP;
Yoshikazu Tsugami, Kanagawa-ken, JP;
Kohei Shimatani, Kanagawa-ken, JP;
Masashi Yamage, Kanagawa-ken, JP;
Ivan Petrov Ganachev, Kanagawa-ken, JP;
Yoshikazu Tsugami, Kanagawa-ken, JP;
Kohei Shimatani, Kanagawa-ken, JP;
Masashi Yamage, Kanagawa-ken, JP;
Shibaura Mechatronics Corporation, Yokohama-shi, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A plasma generating apparatus includes a coaxial convertor for coaxial-converting a microwave, a generally annular ring slot that passes the coaxial-converted microwave, and a dielectric window that propagates the microwave passed through the ring slot. A plasma is produced by the microwave propagated through the dielectric window. This enables stable formation of a plasma having a uniform distribution over a large area.